Coherent Corp. has announced the introduction of a new electro-optic modulator (EOM) designed for high-speed switching of CO₂ lasers used in via drilling applications within the semiconductor industry. The newly released device delivers sub-microsecond pulse generation at laser powers of up to 300W, while eliminating the use of germanium, a material that has become increasingly constrained in global supply chains.
According to Coherent, the EOM is the only germanium-free ultra-fast switching solution currently available that can produce laser pulses shorter than one microsecond with rise and fall times below 200 nanoseconds. By removing reliance on germanium while maintaining high power handling and switching speed, the company positions the new EOM as a benchmark for precision laser modulation in semiconductor via drilling.
Via drilling remains a critical process step in advanced semiconductor manufacturing, particularly for high-density interconnects. However, traditional acousto-optic modulators (AOMs), which commonly rely on germanium, have become more expensive and harder to source. Coherent’s EOM addresses these challenges through a germanium-free architecture that, the company says, delivers higher power handling, shorter pulse widths, and faster switching performance than conventional AOM-based solutions.
In addition to performance improvements, the EOM is designed to simplify system integration. Unlike AOM-based configurations that introduce diffractive beam angles, the electro-optic approach allows straight-through beam alignment, reducing optical complexity and easing installation. Coherent noted that there are currently no comparable EOM alternatives available for CO₂ laser via drilling at this performance level.
“Coherent has been developing electro-optic modulators for more than 50 years,” said Steve Rummel, senior vice president at Coherent. He added that the new EOM responds directly to market needs by combining ultra-fast switching with improved supply security and a more accessible cost structure.
The company is launching the EOM in a fully featured 300W configuration, with a higher-power 1,000W version available for alpha prototype evaluation. The modulator is designed to integrate with Coherent’s CO₂ laser sources and F-Theta lenses, enabling efficient energy delivery and precision control.
