Rigaku Corporation is accelerating development of next-generation semiconductor metrology technologies through an expanded collaboration with imec, as chipmakers face growing manufacturing complexity in advanced semiconductor production.
The Japan-based company announced a three-year development program with imec, the Belgium-headquartered semiconductor research hub. The partnership will focus on advancing X-ray metrology and inspection technologies for emerging semiconductor architectures and advanced packaging applications.
Rigaku said the collaboration will strengthen its capabilities in 3D device metrology, ultrathin film analysis, trace element detection, and non-destructive inspection of microscopic defects. The company aims to address rising demand for highly accurate measurement technologies required for stable high-volume semiconductor manufacturing.
The semiconductor industry is rapidly shifting toward advanced architectures such as Gate-All-Around (GAA) and Complementary Field-Effect Transistors (CFET). At the same time, manufacturers are increasing memory density and adopting more advanced packaging technologies. These transitions are creating new challenges in process control, defect inspection, and yield optimization.
Rigaku identified four strategic focus areas under the collaboration. These include metrology technologies for CFET devices, photomask degradation analysis for EUV lithography, non-destructive inspection technologies for advanced semiconductor packaging, and nanostructure evaluation for next-generation 3D DRAM memory devices.
As semiconductor geometries continue shrinking, manufacturers are increasingly relying on high-precision inspection systems to maintain process stability and production quality. Demand for advanced metrology tools is also rising alongside global investment in AI processors, high-bandwidth memory, and next-generation computing infrastructure.
Markus Kuhn said the serviceable available market for advanced AI semiconductor metrology and inspection technologies could reach approximately US$1 billion by 2030. He added that Rigaku aims to secure a 50% share of that market through differentiated, high-value products.
Kuhn said the collaboration with imec is expected to strengthen Rigaku’s competitiveness in advanced semiconductor measurement and inspection technologies while supporting long-term growth.
Headquartered in Akishima, Rigaku develops X-ray analytical and inspection systems used across semiconductor, industrial, scientific, and research sectors. The company said it will continue expanding its metrology portfolio to support evolving semiconductor manufacturing requirements globally.
