Gigaphoton Inc., a manufacturer of light sources for semiconductor lithography, has developed hTGM for ArF, an on-site neon gas recycling system designed…
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Gigaphoton Joins Japan’s Moonshot Program with Excimer Laser R&D
by EC Editorby EC EditorGigaphoton Inc., a manufacturer of light sources for semiconductor lithography, has announced its participation in Japan’s Moonshot Research and Development Program, a…