Rigaku Corporation has launched the CT Lab HR160, a high-resolution X-ray computed tomography (CT) system designed for non-destructive analysis of batteries, semiconductor devices, electronic components and advanced materials.
The system was developed in collaboration with Excillum AB, a Stockholm-based X-ray technology company. It combines Rigaku’s CT imaging expertise with Excillum’s NanoTube N3 X-ray source.
The CT Lab HR160 operates at up to 160 kV and delivers a claimed true spatial resolution of 250 nanometers. Rigaku said the resolution enables three-dimensional imaging of fine internal structures and defects that can be difficult to detect using conventional laboratory CT systems.
The system is designed for applications where manufacturers and researchers need to examine internal structures without damaging the sample. These include solid-state batteries, semiconductor devices, multilayer ceramic capacitors (MLCCs) and power electronics.
As components and materials become smaller and more complex, internal inspection is becoming increasingly important during research and development, quality evaluation and failure analysis. X-ray CT allows users to examine internal features and defects without physically sectioning a component.
The CT Lab HR160 uses cone-beam geometry. This allows users to adjust the field of view and resolution without changing the X-ray source or detector. Rigaku said the configuration is intended to simplify imaging across different sample sizes and inspection requirements.
The combination of high voltage and fine spatial resolution is aimed at supporting analysis across a broad range of materials and devices. The system can be used to investigate internal structures, manufacturing defects and potential failure points in advanced components.
For battery developers, the technology can provide three-dimensional views of internal structures without destructive preparation. Semiconductor and electronics manufacturers can similarly use CT imaging to inspect packaging, interconnections and other internal features.
Rigaku said the system is intended to support faster development and decision-making by providing high-resolution CT capabilities within a laboratory environment. The company also sees applications in manufacturing quality assessment and failure analysis.
“CT Lab HR160 gives customers a new option for addressing increasingly complex analytical challenges in advanced materials and electronic devices,” said Kiyoshi Ogata, general manager of the Product Division at Rigaku. “By providing high-resolution CT capabilities in a laboratory environment, we aim to support faster decision-making across research, development, quality evaluation, and failure analysis.”
Excillum’s NanoTube N3 X-ray source is a key component of the system. The collaboration combines the source technology with Rigaku’s CT platform to target applications requiring high-resolution imaging.
“We are pleased to see Excillum’s X-ray source technology integrated into Rigaku’s new CT Lab HR160 system,” said Sara Haack, chief commercial officer at Excillum. “This collaboration brings together the strengths of both companies and creates new opportunities to support R&D and manufacturing at the forefront of advanced industries.”
The launch comes as semiconductor devices, batteries and electronic components continue to increase in density and complexity. For manufacturers, identifying internal defects at an early stage can help reduce development cycles and improve quality control.
The CT Lab HR160 expands the use of laboratory-based X-ray CT into applications where increasingly small internal features require higher imaging resolution. Its non-destructive approach also allows researchers and manufacturers to inspect samples while preserving them for further testing or analysis.
